規(guī)格  | 中心高  | 測量直徑  | 精度  | |
平行方向μm  | 垂直方向μm  | |||
200  | 100  | 130  | ≤6  | ≤4  | 
300  | 170  | 270  | ≤8  | ≤5  | 
300  | 250  | 420  | ≤8  | ≤5  | 
300  | 300  | 520  | ≤8  | ≤5  | 
500  | 170  | 270  | ≤8  | ≤5  | 
500  | 250  | 420  | ≤8  | ≤5  | 
500  | 300  | 520  | ≤8  | ≤5  | 
1000  | 170  | 270  | ≤10  | ≤8  | 
1000  | 250  | 420  | ≤10  | ≤8  | 
1000  | 300  | 520  | ≤10  | ≤8  | 
1500  | 250  | 400  | ≤16  | ≤15  | 
2000  | 250  | 400  | ≤30  | ≤20  | 

